Importance

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Abstract

An automatic support pillar transfer mechanism is provided that enables an enlarged transfer range, reduced produce failure and mass-production. The touch sensors 17a to 7c are arranged on the moving section 12 to measure the plane orientation of the surface of the jig 7. The jig adjusting section 6 is driven based on the measurement results on the plane orientations of surfaces of the jig 7 to adjust the surface of the jig 7 in parallel. With plural support pillars 15 sucked and held at predetermined intervals by the jig 7 adjusted in parallel, the bonding agent coated substrate 14 attached on the moving section 12 is descended to coat the bonding agent 13 onto the one ends of the support pillars 15. The substrate 16 to which the support pillars 15 are transferred is attached to the moving section 12. Variations in plane orientation of surfaces of the substrate 16 are respectively measured by means of the touch sensors 5a to 5c. The jig adjusting section 6 is driven according to the variations in plane orientation of the surfaces of the substrate 16. With the surface of the jig 7 arranged in parallel to the surface of the substrate 16, the moving section 12 is descended to transfer the support pillars 15 onto the surface of the substrate 16.

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First Claim