
US Patent No: 6,222,866
Number of patents in Portfolio can not be more than 2000
Surface emitting semiconductor laser, its producing method and surface emitting semiconductor laser array
Stats
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Apr 24, 2001
Issued date -
Dec 29, 1997
filing date -
08/998,624
serial no -
In Force
status
Importance
Abstract
A surface emitting semiconductor laser comprises a semiconductor multilayer reflecting film of a first conductivity type, a quantum well active layer having at least one quantum well structure, a semiconductor multilayer reflecting film of a second conductivity type and a contact layer of the second conductivity type sequentially stacked in a layered manner inside a concavity formed on a surface of a semiconductor substrate. The contact layer of the second conductivity type is formed in a buried manner so that the surface of the contact layer is approximately flush with the surface of the semiconductor substrate. A second electrode is formed on a part of the surface of the contact layer other than a part left for forming a light guiding region thereon.
First Claim
Related Publications
International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 5,528,615 Semiconductor laser and method of producing the semiconductor laser | 11 | 1994 | |
| 5,701,321 Semiconductor laser producing short wavelength light | 24 | 1996 | |
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| 4,532,694 Method of fabricating emitter/detector-in-a-well for the integration of electronic and optoelectronic components | 8 | 1983 | |
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| 5,466,633 Optical reading head and method for making same | 2 | 1994 | |
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| 5,163,064 Laser diode array and manufacturing method thereof | 22 | 1991 | |
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| 5,031,187 Planar array of vertical-cavity, surface-emitting lasers | 96 | 1990 | |
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| 5,062,115 High density, independently addressable, surface emitting semiconductor laser/light emitting diode arrays | 55 | 1990 | |