Crystal diameter control system
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United States of America Patent
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May 1, 2001
Grant Date -
N/A
app pub date -
Jun 10, 1997
filing date -
Jul 16, 1996
priority date (Note) -
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status (Latency Note)
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Abstract
A system controls the diameter of both a neck region and a full diameter region of a monocrystalline rod being pulled from molten material held in a crucible. The system uses a video camera viewing light reflected from a meniscus around the rod where the rod emerges from a melt surface of the molten material. The video camera has a zoom lens for enlarging an image of the meniscus during growth of the neck of the rod and for reducing an image of the meniscus during growth of a full diameter body of the rod. A computer controlling a pull rate for the neck growth of the rod is rapidly responsive to a count of total camera pixels illuminated by the image of the meniscus during neck growth.
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