Thin-film capacitor
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United States of America Patent
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May 1, 2001
Grant Date -
N/A
app pub date -
Apr 19, 1999
filing date -
Apr 20, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A thin-film capacitor comprises an electrically insulating substrate which is provided with at least two inner electrodes which are separated from each other by means of the dielectric layer. The capacitor also includes two end contacts which each electroconductively contact one of the inner electrodes. The electroconductive contact takes place via a through-connection which communicates exclusively with the main surface of the inner electrode. By virtue of this measure, it is achieved that the contact resistance between the end contacts and the inner electrodes is relatively low and reproducible. As a result, also the value of the ESR of the thin-film capacitor is low, so that the capacitor can very suitably be used for high-frequency applications.
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