Importance

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Abstract

A method of manufacture of an ink jet print head arrangement including a series of nozzle chambers is disclosed, the method comprising the steps of: (a) utilizing an initial semiconductor wafer having an electrical circuitry layer formed thereon; (b) etching the electrical circuitry layer so as to define a nozzle chamber area; (c) depositing and etching a first sacrificial layer, the etching defining a series of nozzle chamber walls and an actuator anchor point; (d) depositing a first heater material layer; (e) depositing an intermediate material layer; (f) etching the first heater material layer and the intermediate material layer to define portions of actuator, ejection paddle and nozzle chamber walls; (g) depositing and etching a second sacrificial layer, the etching including etching a cavity defining a portion of the nozzle chamber walls; (h) depositing and etching a further glass layer to define the roof of the nozzle chamber and the walls thereof; (i) etching an ink supply channel through the wafer to form a fluid communication with the nozzle chamber; (j) etching away remaining sacrifical material.

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First Claim