Heat treatment apparatus
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United States of America Patent
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May 8, 2001
Grant Date -
N/A
app pub date -
Feb 3, 1999
filing date -
Feb 3, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A heating treatment apparatus comprises a hot plate on which a substrate to be processed is to be mounted, a heater for heating the hot plate, a plurality of first sensors for detecting temperatures of a plurality of portions of the hot plate, respectively, a second sensor for detecting temperature of a representative portion of the hot plate, and a controller for controlling a heat generating operation of the heater on the basis of a plurality of first detection temperatures detected by the first sensors respectively and a second detection temperature detected by the second sensor, thereby controlling temperature of the hot plate.
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