Semiconductor acceleration sensor and its self-diagnosing method
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United States of America Patent
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May 15, 2001
Grant Date -
N/A
app pub date -
Aug 11, 1999
filing date -
Feb 19, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The invention provides a semiconductor acceleration sensor which is small in size, light in weight, simple in manufacture, low in manufacturing cost, and high in accuracy, and which, with a switch-on time set to a predetermined value, is stable in operation. In a semiconductor acceleration sensor in which a central board 1 having a central contact section 11, and outside boards 2 at least one of which has an outside contact section 21 are stacked; the central board 1 has a weight 12 near the central contact section 11, and the outside board 2 having the outside contact section 21 has a weight confronting section 11 which confronts with the weight 12, for squeezed damping effect.
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