Process for improving the contrast in the structure of 3-dimensional surfaces
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United States of America Patent
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May 15, 2001
Grant Date -
N/A
app pub date -
Sep 22, 1998
filing date -
Aug 30, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Three-dimensional, patterned surfaces, which were produced by dry-etching technology and have zones with different degrees of polymerization, are subjected to a time-limited dry-etching process in fluorine-containing plasma, In this context, an ablation process is used, which proceeds as a function of time, from incompletely polymerized material to completely polymerized material. Weakly polymerized regions, in particular those resulting from the proximity effect, may be removed.
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