Importance

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Abstract

A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to one end of the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device. The probe housing is engaged with both a force cable that includes a force conductor surrounded by a guard conductor and a sense cable that includes a sense conductor surrounded by a guard conductor. A first coupler electrically interconnects the force conductor, the sense conductor, and the elongate conductive path on the first side of the substrate when the probing device is engaged with the probe housing. A second coupler electrically interconnects the guard conductor of the force and sense cables and the conductive area on the second side of the substrate when the probing device is engaged with the probe housing.

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First Claim