Importance

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Abstract

An apparatus and method is provided for testing performance characteristics of a MEMs device. The apparatus includes a test probe that is electrically connected to a mechanical member of the MEMs device for receiving electrical data signals from the MEMs device that are indicative of the movement of the mechanical member due to external excitation . The apparatus also includes communications or transmitting the signals from the test probe and an analyzer for receiving the signals and for analyzing the signals to determine the performance characteristics of the MEMs device. The apparatus a so includes an amplifier connected between the test probe and the communications. The amplifier is placed in close proximity to the test probe such at it amplifies the signals prior to transmission of the signals by the communications. As such, the electrical data signals are amplified before sufficient noise is introduced into the signals to reduce their signal to noise ratio to less than a predetermined level. By amplifying the signals prior to the introduction of significant noise, the signals, which may have relatively small amplitude, are not obscured by the noise.

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First Claim