Importance

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Abstract

A magnetically actuated ink jet printing device for use in an ink jet printer ejects ink droplets by deforming a diaphragm with the force generated on an electrode in a magnetic field when an electric current pulse is applied thereto. In one embodiment, the diaphragm of the device is provided by anisotropically etching a silicon substrate with an etch stop which provides a thin membrane of silicon material for use as the diaphragm. An electrode having an input and output terminal is patterned over the diaphragm and a sacrificial layer is deposited over the silicon substrate surface containing the diaphragm. The sacrificial layer is patterned to subsequently provide the ink ejection chamber over the diaphragm. A patternable layer is deposited over the silicon substrate surface including the sacrificial layer and patterned to provide the nozzles and expose the electrode terminals. The sacrificial layer is removed and an ink supply is connected to the space previously occupied by the sacrificial layer. Magnetic field generating means having a predetermined magnetic field strength are placed adjacent the device, and electric current applied to the electrode terminals in a predetermined direction relative to the magnetic field produces a force necessary to deform the diaphragm and eject an ink droplet from the nozzles of the printing device.

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First Claim