Thin substrate transferring apparatus
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United States of America Patent
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May 22, 2001
Grant Date -
N/A
app pub date -
Apr 8, 1999
filing date -
Apr 24, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In a thin substrate transferring apparatus of this invention, the transfer stroke of a hand of a robot is lengthened and the swivel radius is made small resulting in a more compact apparatus. The apparatus has cassettes, housing a substrate, a robot transferring the substrate, and at least one processing unit. The robot has a vertical swivel arm body swiveling in the vertical direction on a machine bed, and a horizontal swivel arm body having two arm sets swiveling in the horizontal direction on a movable machine bed. The vertical swivel arm body has a first arm and a second arm respectively joined rotatable in the vertical direction and a hand is moved substantially in parallel in the vicinity of the cassettes, or the processing unit, and the horizontal swivel arm body has a first link and a second link and the hand is moved into the cassettes, or the processing unit.
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