Defect evaluation apparatus for evaluating defects and shape information thereof in an object or on the surface of an object
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United States of America Patent
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May 22, 2001
Grant Date -
N/A
app pub date -
Sep 28, 1998
filing date -
Sep 30, 1997
priority date (Note) -
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Abstract
A defect evaluation apparatus of this invention includes a laser irradiation unit for obliquely irradiating a laser beam onto an object, and an observation unit for observing scattered light from inside the object or a surface of the object. The laser irradiation unit irradiates the laser beam onto the object from a plurality of incident directions around an observation optical axis, and the observation unit receives the scattered light from the object to obtain shape information of a defect in the object or on the surface of the object.
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