Method for making topographic projections
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United States of America Patent
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May 22, 2001
Grant Date -
N/A
app pub date -
Feb 22, 1996
filing date -
Feb 22, 1996
priority date (Note) -
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Abstract
A method for producing topographic projections, especially useful for producing many small projections of less than about 100 .mu.m in diameter and in height. This method is useful for making contact pads of membrane probes used to test integrated circuits and spacers of liquid crystal light valves.
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