Thin film measuring device and method
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United States of America Patent
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May 22, 2001
Grant Date -
N/A
app pub date -
Nov 5, 1998
filing date -
Nov 5, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An interferometric thin film measuring device has a source of illumination light, a detector disposed in a return path of light reflected from a specimen of illumination light, a plurality of wavelength filters that filter light into image channels, a weight vector calculating device that receives detected signals, a look-up table storage unit that stores calibration weight vectors, a weight vector comparing unit that compares calibration weight vectors from the look-up table storage unit to subject weight vectors, and a data output/storage unit to output the measured thin film values.
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