Processing solution supply apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 29, 2001
Grant Date -
N/A
app pub date -
Jun 30, 2000
filing date -
Jul 2, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A circulating path from a supply pipe to a filter, from the filter through a vent pipe, returning to the supply pipe is formed, and a first three-way valve is provided at the vent pipe. On the other hand, a circulating path from the supply pipe to a discharge pump, from the discharge pump through a purge pipe, returning to the supply pipe is formed, and a second three-way valve is provided at the purge pipe. The first three-way valve and the second three-way valve are switched, thereby performing an operation of removal of bubbles in the piping.
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