Developing method and developing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 29, 2001
Grant Date -
N/A
app pub date -
Mar 31, 2000
filing date -
Apr 2, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
When a resist film formed on a substrate is exposed in a predetermined pattern and thereafter an exposed pattern is developed, a substance capable of decreasing fluidity of the developing solution is added to the developing solution, the developing solution to which the substance is added is caused to become low-fluid under a predetermined condition, the developing solution is applied onto the exposed resist film on the substrate, and thereafter a predetermined trigger is given to the developing solution to cause the developing solution to become high-fluid so as to allow developing to progress. Thereby, line width can be made uniform and defects do not tend to occur during coating of the developing solution.
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