Device for treating substrates in a fluid container
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United States of America Patent
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-
Jun 5, 2001
Grant Date -
N/A
app pub date -
Dec 6, 1996
filing date -
May 29, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A treatment apparatus for treating substrates includes a fluid container and a device for moving in a reciprocating manner the substrates within the fluid container during treatment to thereby make accessible areas of the substrates that would otherwise be obstructed by parts of the device.
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