Compliant wafer chuck

United States of America Patent

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Jun 5, 2001
Grant Date
N/A
app pub date
Apr 16, 1999
filing date
Apr 16, 1999

priority date (Note)
Expired

status (Latency Note)

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Abstract

A compliant wafer chuck for supporting a substrate in which an upper body of the chuck is allowed to tilt relative to the base.

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Patent Owner(s)

Patent Owner	Address
CUTEK RESEARCH INC	SAN JOSE CA

International Classification(s)

C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Wytman, Joseph	San Jose, CA	3	70

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Compliant wafer chuck

Number of patents in Portfolio can not be more than 2000

United States of America Patent

09293012

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Patent Longevity Expired	Forward Citations

PATENT NO	6241825
SERIAL NO	09293012
DOCKET NO

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09293012

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Abstract

First Claim

Family

Patent Owner(s)

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