Interferometric instrument provided with an arrangement for periodically changing a light path of a received beam component
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United States of America Patent
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Jun 5, 2001
Grant Date -
N/A
app pub date -
May 26, 1998
filing date -
May 26, 1997
priority date (Note) -
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status (Latency Note)
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Abstract
An interferometric instrument for sensing the surfaces of a test object includes a radiation generating unit for emitting briefly coherent radiation and a first beam splitter for producing a first beam component and a second beam component. One beam component is aimed at the surface of the test object, and the other beam component is aimed at a device with a reflecting element for periodically changing the light path. The instrument also has an interference element which causes the radiation coming from the surface and the radiation coming from the device to interfere with one another, and a photodetector which receives the radiation. With a simple design, it is possible to increase the measuring accuracy by providing the device for changing the light path with an arrangement producing a parallel shift positioned in the optical path, followed by a stationary reflecting element.
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