Micromechanical gradient sensor
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United States of America Patent
Stats
-
Jun 12, 2001
Grant Date -
N/A
app pub date -
Oct 27, 1999
filing date -
Oct 30, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A micromechanical gradient sensor having a substrate, a ring body which is mounted elastically above the substrate with the assistance of a first spring device, a driving device which is connected to the ring body for driving the ring body to rotary motions about the ring axis, and an acceleration sensing device which is secured to the ring body via a second spring device. The acceleration sensing device is designed in such a manner that, as a result of the centrifugal force acting due to the rotary motions, and as a result of the force acting against the spring tension of the two spring devices due to the gravitational acceleration, the acceleration sensing device is able to travel out along the sensor axis connecting it, and running through the ring axis. Also included is an evaluation unit for determining the excursion of the acceleration sensing device and for determining the angle of inclination of sensor axis relative to the perpendicular component.
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