Vibrating tip conducting probe microscope
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United States of America Patent
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Jun 12, 2001
Grant Date -
N/A
app pub date -
Mar 23, 1999
filing date -
Mar 23, 1999
priority date (Note) -
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Abstract
A scanning probe microscope is provided for measuring at least one characteristic of a surface, the microscope including a force sensing probe which is responsive to the at least one characteristic of the surface, an oscillator which moves the position of the probe relative to the surface, a voltage source for establishing an electrical potential between the force sensing probe and the surface, and a detector which detects the oscillating component of the electrical current flow into or out of the probe as a measure of the at least one characteristic of the surface. The microscope can be operated to simultaneously acquire both electrical and topographical information from a surface of a substrate.
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