Apparatus for reducing reflections off the surface of a semiconductor surface
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United States of America Patent
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Jun 12, 2001
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N/A
app pub date -
Dec 31, 1996
filing date -
Dec 31, 1996
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Abstract
An apparatus for reducing the reflection of photons off the surface of a semiconductor device under test. In one embodiment, the present invention includes a semiconductor device comprising an integrated circuit formed on the top side of a semiconductor substrate. An anti-reflective coating is disposed over the back side of the semiconductor substrate for reducing the reflection of photons at the silicon/air interface.
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