System and method for knowledgebase generation and management

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United States of America Patent

PATENT NO 6246787
SERIAL NO

08866771

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Abstract

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A method and system for generating and managing a knowledgebase for use in identifying anomalies on a manufactured object, such as a semiconductor wafer, includes measures for adding, deleting, and organizing data from the knowledgebase.

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Patent Owner(s)

Patent OwnerAddress
RUDOLPH TECHNOLOGIES INCONE RUDOLPH ROAD FLANDERS NJ 07836

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cleavelin, C Rinn Lubbock, TX 22 1362
Hastings, II Howard V Lubbock, TX 4 361
Hennessey, A Kathleen Lubbock, TX 12 1072
Kinokoglu, Pinar Plano, TX 1 106
Lin, YouLing Plano, TX 19 1061
Reddy, Rajasekar Dallas, TX 6 745
Wong, Wan S Dallas, TX 3 356

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