Substrate transfer apparatus and method of substrate transfer
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United States of America Patent
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Jun 19, 2001
Grant Date -
N/A
app pub date -
Jan 14, 2000
filing date -
Jan 18, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate transfer apparatus, for minimizing flexion or bending when transferring a large-sized angular substrate or plate, wherein transfer arms are constructed with holding portions extending in a direction perpendicular to a transfer direction and further holding portions extending in a direction parallel to the transfer direction, respectively. As a result of this, it is possible to suspend the glass substrate W at the four peripheral side portions from below by means of the holding portions of the transfer arms and to move or transfer it suspended in this way.
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