Shadow sculpted thin films
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United States of America Patent
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-
Jun 19, 2001
Issued Date -
N/A
app pub date -
Nov 12, 1998
filing date -
Jul 23, 1996
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A thin film microstructure is formed from a substrate having a film of vapor deposited material extending in distinct helical columns from the substrate. The distinct helical columns may terminate distally from the substrate in a region of denser material forming a cap for the helical columns. The cap and substrate may be each connected, respectively, to first and second electrodes, and may operate in conjunction with an acoustic wave sensor.
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Cited Art Landscape
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