Method of fabricating a surface shape recognition sensor
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United States of America Patent
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Jun 19, 2001
Issued Date -
N/A
app pub date -
Feb 29, 2000
filing date -
Mar 5, 1998
priority date (Note) -
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status (Latency Note)
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Abstract
A surface shape recognition sensor of this invention includes at least a plurality of capacitance detection elements having sensor electrodes arranged in the same plane on an interlevel dielectric film formed on a semiconductor substrate to be insulated/isolated from each other, capacitance detection means for detecting the capacitances of the capacitance detection elements, and a stationary electrode disposed on the interlevel dielectric film to be insulated/isolated from the sensor electrodes. When an object to be recognized touches the upper surface of the stationary electrode, the capacitances detected by the capacitance detection elements change in accordance with the recesses/projections on the upper surface.
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