Angular rate sensor
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United States of America Patent
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Jun 26, 2001
Grant Date -
N/A
app pub date -
Jun 22, 1999
filing date -
Jun 22, 1998
priority date (Note) -
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status (Latency Note)
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Abstract
An angular rate sensor has a pair of masses located symmetrically with respect to a point on the xy-plane, a support beam connected to each of the masses so as to be substantially movable in a direction, a center anchor supporting the support beam at the point, a floating body having a plurality of slits and located symmetrically with respect to the point, and a pair of displacement detecting elements located in the slits to detect rotational vibration about the point when an angular rate occurs. A connecting beam is located symmetrically with respect to the point, and driving electrodes vibrate in an anti-phase manner.
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