Contact structure and production method thereof

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United States of America Patent

PATENT NO 6250933
SERIAL NO

09488661

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A contact structure for achieving an electrical connection with a contact target is formed of a contact substrate and a plurality of contactors mounted on the contact substrate. The contactors are produced on a semiconductor substrate or other dielectric by a microfabrication technology. Each of the contactors has a contact bump to contact with the contact target. In one aspect, one of the base portions of the contactor is slidably formed on the surface of the contact substrate. A spring force is generated when the contactor is pressed against the contact target. Various types of contact structures and the associated production methods are also described.

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Patent Owner(s)

  • ADVANTEST CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Frame, James W Chicago, IL 11 467
Khoury, Theodore A Chicago, IL 44 1521

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