Probe station having environment control chamber with bendably extensible and retractable lateral wall assembly
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jun 26, 2001
Grant Date -
N/A
app pub date -
Jul 12, 1999
filing date -
Jun 6, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A probe station for probing a test device has a chuck assembly substantially enclosed by an environment control enclosure and laterally movable relative to such enclosure. The environment control enclosure includes a flexible wall assembly interconnected with the chuck assembly to enable such lateral movement thereof along mutually perpendicular directions while maintaining the integrity of the enclosure. The flexible wall assembly has flexible pleats formed therein extending along respective different lateral directions to enable such lateral movement.
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Cited Art Landscape
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