Capacitive pressure sensors or capacitive differential pressure sensors
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United States of America Patent
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-
Jun 26, 2001
Grant Date -
N/A
app pub date -
Mar 14, 1995
filing date -
Mar 18, 1994
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
In order to avoid short-circuits between the electrodes, the pressure sensor comprises: a substrate (11) made of ceramic material, on one surface of which an electrode (13) and a glass layer (14) formed from an original glass frit are disposed; a diaphragm (12) made of ceramic material, which is permanently joined and pressure-sealed to the substrate by means of the original glass frit acting as a spacer (17) holding the diaphragm and the substrate from each other to form a cavity (16), and which on the cavity side is provided with an electrode (15); and leads (18, 19) which extend inwards and/or through the diaphragm (12) to the electrodes (13, 15) in the region of the spacer (17). The differential pressure sensor is formed in a mirror-inverted arrangement in relation to the centre plane of the substrate, so that it carries two pressure sensors. These are pressure-linked by a hole (41) filled with oil and connecting the two cavities and leading through the substrate and outwards. In a further development, thin insulating layers (20; 40, 40') made of the material of the ceramic of the substrate or of a high-temperature glass can be fixed on the glass layer(s), respectively.
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