Planar reflective light valve backplane
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United States of America Patent
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-
Jun 26, 2001
Grant Date -
N/A
app pub date -
Dec 23, 1998
filing date -
Dec 23, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A planar wafer based device (e.g., a reflective light valve backplane) includes a substrate having a plurality of surface projections (e.g., pixel mirrors) defining gaps therebetween, an etch-resistant layer formed on the substrate, and a fill layer formed on a portion of the etch-resistant layer in the gaps. In a particular embodiment, the fill layer is a spin-on coating. An optional protective layer formed on the exposed portions of the etch-resistant layer and the fill layer protects the underlying layers during subsequent processing steps.
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Cited Art Landscape
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