Contact structure formed by microfabrication process

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United States of America Patent

PATENT NO 6255727
SERIAL NO

09368003

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A contact structure for achieving an electrical connection with a contact target is formed by producing contactors on a semiconductor substrate by a microfabrication technology. The contact structure is formed of a contact substrate and a plurality of contactors mounted on the contact substrate. Each of the contactors has a sphere contact to contact with the contact target when the contact structure is pressed against the contact target. A spring force is generated when the contactor is pressed against the contact target. Various types of contact structures and the production method thereof are also described.

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Patent Owner(s)

  • ADVANTEST CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Khoury, Theodore A Chicago, IL 44 1521

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