Process for working a preform made of an oxide single crystal, and a process for producing functional devices

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United States of America Patent

PATENT NO 6257224
SERIAL NO

09031566

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Abstract

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A process for dicing a preform made of an oxide single crystal into cut pieces each having a given shape, includes the steps of removing molecules of the oxide single crystal through dissociation and evaporation with an optochemical reaction under irradiation of a laser beam upon the preform, thereby forming grooves on the preform, and then cleaving the preform along the groove.

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Patent Owner(s)

Patent OwnerAddress
DISCO CORPORATION13-11 OMORI-KITA 2-CHOME OTA-KU TOKYO 143-8580

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Imaeda, Minoru Nagoya, JP 60 696
Kato, Kenji Ama-Gun, JP 319 2972
Yoshino, Takashi Ama-Gun, JP 121 1040

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