Fluid control device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 10, 2001
Grant Date -
N/A
app pub date -
Sep 3, 1999
filing date -
May 10, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is passed through the relatively long subchannel.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully