Passivation for micromechanical devices
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United States of America Patent
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Jul 10, 2001
Grant Date -
N/A
app pub date -
Sep 27, 1999
filing date -
Sep 30, 1998
priority date (Note) -
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status (Latency Note)
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Abstract
A non-volatile passivation coating for micromechanical devices. The device has at least one surface (10) that contacts other surfaces and requires passivation. The passivation is provided by a monolayer of molecules (16) that has cross links (18) between the monolayers, or is of an highly stable material. The monolayer is applied by vacuum vapor coating, melt coating or coating from solution. The non-volatility of the monolayer eliminates the need for a hermetic package.
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