Method for producing a monolithic multilayer piezo actuator
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United States of America Patent
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Jul 17, 2001
Grant Date -
N/A
app pub date -
Oct 19, 1998
filing date -
Apr 19, 1996
priority date (Note) -
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Abstract
A method for manufacturing a monolithic piezoelectric actuator of multilayer design and having a high aspect ratio of more than two built up from a plurality of smaller stacks in a multilayer design, includes alternately layering green piezoceramic films and electrode material, compressing the layers while elevating the temperature to remove the binder and thereby form a composite, stacking several of the composites on one another, and sintering the stack so as to form the monolithic piezoelectric actuator which exhibits an improved mechanical strength with good piezoelectric properties.
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