Heat treatment method, heat treatment apparatus and treatment system
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United States of America Patent
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Jul 17, 2001
Grant Date -
N/A
app pub date -
Mar 19, 1999
filing date -
Mar 20, 1998
priority date (Note) -
In Force
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Abstract
When a substrate coated with a coating solution which oxidizes at high temperatures is heat-treated, an oxygen concentration of a treatment atmosphere is lowered when the temperature is low. Next, the substrate is heat-treated in the treatment atmosphere of which the oxygen concentration is lowered. Sequentially, the treatment atmosphere is returned to that with the original oxygen concentration after the passage of a predetermined time after completing the heat treatment. Thereby, the substrate can be heat-treated, with the oxidization of the coating solution being controlled.
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