Advanced process control for semiconductor manufacturing
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United States of America Patent
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Jul 17, 2001
Grant Date -
N/A
app pub date -
May 18, 1998
filing date -
May 18, 1998
priority date (Note) -
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Abstract
An Advanced Process Control (APC) Framework performs automatic process control operations through the design and development of a software framework that integrates factory, process, and equipment control systems. The APC Framework benefits semiconductor-manufacturing factories, or 'fabs,' throughout the development of the APC Framework by using an iterative development approach. The APC Framework is designed to integrate seamlessly with commercially-available APC tools. The APC Framework specifies components and a component structure that enable multiple vendors to build and sell framework-compatible products using an open architecture that accommodates plug-and-play components. The APC Framework advantageously increases product yield distributions and equipment utilization, and lowers defect densities.
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