Importance

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Abstract

An interconnect for testing semiconductor components includes a thinned substrate, and first contacts on the substrate for electrically engaging second contacts on the components. The interconnect can be configured for use with a testing apparatus for testing discrete components such as dice or chip scale packages, or alternately for use with a testing apparatus for testing wafer sized components, such as wafers, panels and boards. The thinned substrate has a thickness that is substantially less than a thickness of the components being tested. The thinned substrate can flex upon application of a biasing force by the testing apparatus, permitting the first contacts to move in the z-direction to accommodate variations in the planarity of the second contacts. For fabricating the interconnect, the first contacts are formed on the substrate, and then covered with a protective mask. With the mask in place, the substrate can be thinned by grinding, chemical mechanical planarization, or alternately by etching a backside of the substrate. Other process steps such as via formation and backside metallization can also be performed with the protective mask in place. The protective mask can then be removed, and the thinned substrate attached to a rigid substrate, or base, using a compliant polymer layer.

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First Claim