Plastic membrane pressure sensor for the semiconductor industry
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United States of America Patent
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Jul 24, 2001
Grant Date -
N/A
app pub date -
Dec 22, 1999
filing date -
Dec 22, 1998
priority date (Note) -
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Abstract
A membrane pressure sensor has a hollow space formed between a housing (1) and a cover (2), which is subdivided by two membranes (6; 61, 62) parallel to each other into a pressure sensing space (24) for impingement with a fluid with a pressure to be measured, into an air evacuation space between the membranes (6; 61, 62), and into a measurement fluid filled pressure output space (13) to forward the pressure to a pressure measurement arrangement (10), wherein the membranes (6; 61, 62) are made of a perfluoroalkoxy copolymer (PFA) and are designed shaped and congruent with the interposition of a plastic fiber insert (63). In this pressure sensor, the membrane (61) on the pressure sensing side is in direct contact with the cover (2), and an O-ring (3) is provided to seal the air evacuation space between the housing (1) and the cover (2). The housing (1) and cover (2) are made of a fluoropolymer. The pressure sensor is particularly suited for processes in which the entry a foreign metal ions into the test substance must absolutely be avoided.
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