Process for reclaiming a suspension

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United States of America Patent

PATENT NO 6264843
SERIAL NO

09526835

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Abstract

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A process for reclaiming a suspension which is produced during the machining of semiconductor material and which contains a liquid, a substance with an abrasive action and abraded semiconductor material, includes separating off the substance with an abrasive action and then separating the liquid and the abraded material. In the process, the liquid and the abraded material are separated with the aid of a magnetic separator.

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Patent Owner(s)

Patent OwnerAddress
WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALIEN AGJOHANNES-HESS-STRASSE 24 BURGHAUSEN 84489

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wiesner, Peter Marktl, DE 33 148

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