Methods of making microelectronic components having electrophoretically deposited layers

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United States of America Patent

PATENT NO 6266874
SERIAL NO

09118735

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Abstract

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A method of making a microelectronic component by providing a conductive element, providing a resist at selected locations on said conductive element and electrophoretically depositing an uncured dielectric material on the conductive element, wherein the uncured material will be deposited on the conductive element except at locations covered by the resist. The deposited material is cured to form a dielectric layer and the resist is removed so that the dielectric layer has openings extending to the conductive element at locations the locations which were covered by the resist.

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Patent Owner(s)

Patent OwnerAddress
TESSERA INC3025 ORCHARD PARKWAY SAN JOSE CA 95134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DiStefano, Thomas H Monte Sereno, CA 191 14662
Fjelstad, Joseph Sunnyvale, CA 130 7144
Karavakis, Konstantine N Cupertino, CA 15 389
Kovac, Zlata Los Gatos, CA 24 1550
Smith, John W Palo Alto, CA 213 9165

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