Trench-type thin film transistor

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United States of America Patent

PATENT NO 6268625
SERIAL NO

09302997

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Abstract

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A thin film transistor and a method for fabricating the same in which a self alignment method is used to form an offset area and source and drain electrodes are disclosed, the TFT including a substrate; a trench formed in the substrate; an active layer formed on the substrate and on the trench; a gate insulating film formed on the active layer; a gate electrtode formed on the gate insulating film on at least one side of the trench; a source region formed in the active layer on a bottom side of the trench; and drain regions formed in the active layer on the substrate to be isolated form the gate electrode.

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Patent Owner(s)

  • LG SEMICON CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Sang-Ho Chungcheongbuk-do, KR 186 1732

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