Micro adjustable illumination aperture
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jul 31, 2001
Grant Date -
N/A
app pub date -
Aug 30, 1999
filing date -
Aug 30, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The distribution of ultraviolet light irradiated from an illumination source to optical elements of a projection exposure device is varied by an illumination aperture. The illumination aperture is formed with a plurality of openings which may be opened or closed independently to the passage of irradiating light. The size and shape of the opening formed by the plurality of openings of the illumination aperture is determined according to the particular image to be projected.
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