Installation for wet-treating substrates

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United States of America Patent

PATENT NO 6269822
SERIAL NO

09171271

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In a device for the wet treatment of substrates (3) in a container (1), containing a treatment fluid (2), whereby the substrates (3) are introduced into the container (1) with a substrate carrier (5), an optimal alignment and centering of the substrates (3) will result within the container (1) upon lifting from the container (1) with the aid of a substrate receiving device (4) provided within the container (1).

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Patent Owner(s)

Patent OwnerAddress
AKRION SYSTEMS LLC6330 HEDGEWOOD DRIVE ALLENTOWN PA 18106

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Funkhanel, Jurgen Donaueschingen, DE 2 1
Meister, Dieter Blumberg, DE 3 11
Weber, Martin Elsaor, DE 270 2113
Wehrle, Felix Donaueschingen, DE 2 1

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