Treatment device, laser annealing device, manufacturing apparatus, and manufacturing apparatus for flat display device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 7, 2001
Grant Date -
N/A
app pub date -
Jan 13, 1999
filing date -
Jan 13, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A film forming device in a substrate manufacturing apparatus a stage section on which a cassette storing a plurality of glass substrates is mounted. A treatment section for subjecting the substrate to a predetermined treatment is arranged to oppose the stage section. A washing section for washing the substrate is arranged near the stage section and the treatment section and deviated from a space between the stage section and the treatment section in a second direction crossing a first direction passing through the stage section and the treatment section. A transfer robot is arranged between the stage section and the treatment section. The transfer robot transfers the substrate between the stage section, treatment section, and washing section and loads the substrate, washed in the washing section, directly into the treatment section.
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Cited Art Landscape
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