Method for making a micromachine
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United States of America Patent
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-
Aug 7, 2001
Grant Date -
N/A
app pub date -
Nov 30, 1999
filing date -
May 31, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method for making a micromachine, which includes a spherical body and a spherical shell surrounding said spherical body, comprising forming a victim layer on said spherical body to coat said spherical body, forming a function layer on said victim layer, said function layer including at least one conductive material pattern and/or insulating material layer, forming a structure layer of insulating material to coat said spherical body on which said function layer is formed, forming etching bores extending from the outer surface of said structure layer to said victim layer, and introducing gaseous etchant into said etching bores to remove said victim layer.
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