Three dimensional micromachined electromagnetic device and associated methods
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United States of America Patent
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-
Aug 7, 2001
Grant Date -
N/A
app pub date -
Apr 13, 1998
filing date -
Apr 14, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro-electromagnetic device having a three dimensional structure is formed using laser chemical vapor deposition on a conductive surface. Arrays of electromagnetic devices may be formed. Various techniques for facilitating deposition on the conductive surface may be used. A helical antenna for use in the THz region may be formed in accordance with the laser chemical vapor deposition. The antenna is preferably formed on a bolometer.
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