Cylindrical photolithography exposure process and apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6274294
SERIAL NO

09243252

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

The present invention is directed to a novel apparatus for exposing a pattern onto a photoresist-coated substrate cylinder and the process of using the apparatus. The cylindrical photolithography apparatus of the present invention comprises two adjacent cylindrical support rollers between which a portion of a flexible photomask extends in the form of a loop. The photoresist-coated substrate cylinder is received in the loop and a tension device, such as a weight, is engaged with the photomask to pull the photomask into contact with the photoresist-coated substrate cylinder over a substantial portion of the circumference of the substrate cylinder. A drive mechanism pulls the photomask over the surface of the photoresist-coated substrate cylinder thereby causing the substrate cylinder to rotate. Exposure light is provided during movement of the photomask to expose a pattern contained on the photomask onto the photoresist. In an alternative embodiment of the present invention, designed for small substrate cylinders and/or substrate cylinders coated with a thick resist, a cylindrical lens is supported above the support cylinders and the photoresist-coated substrate cylinder to focus the light from the light device in a radial direction to increase resolution of the pattern. In applications requiring even higher resolution, a panel defining an aperture slit is placed between the light device and cylindrical lens to further focus the light rays.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
ELECTROFORMED STENTS, INC.STILWELL, KS4

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hines, Richard A Stilwell, KS 10 439

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (1)
* 4509426 Autoreversing dual axial speed ink roller 14 1984
 
CORDIS CORPORATION (2)
5102417 Expandable intraluminal graft, and method and apparatus for implanting an expandable intraluminal graft 968 1988
5195984 Expandable intraluminal graft 707 1991
 
Advanced Cardiovascular Systems, Inc. (3)
5421955 Expandable stents and method for making same 728 1994
5443500 Intravascular stent 511 1994
5649952 Expandable stents and method for making same 243 1996
 
Industrial Research B.V. (1)
5464419 Expandable hollow sleeve for the local support and/or reinforcement of a body vessel, and method for the fabrication thereof 78 1994
 
MEDINOL LTD. (1)
5449373 Articulated stent 755 1994
 
COMMISSARIAT A L'ENERGIE ATOMIQUE (1)
* 4434547 Process for the manufacture and adjustment of a Josephson effect magnetic flux pick-up 3 1981
 
EXPANDABLE GRAFTS PARTNERSHIP, A TX. GENERAL PARTNERSHIP (1)
4776337 Expandable intraluminal graft, and method and apparatus for implanting an expandable intraluminal graft 1323 1986
 
EXPANDABLE GRAFTS PARTNERSHIP, 8000 I.H. 10 WEST, STE. 1265, SAN ANTONIO, TX A GENERAL PARTNERSHIP OF TX. (1)
4733665 Expandable intraluminal graft, and method and apparatus for implanting an expandable intraluminal graft 2635 1985
 
BODNAR, ENDRE (1)
4343048 Stent for a cardiac valve 376 1980
 
ROITBERG, BEN Z (1)
* 6019784 Process for making electroformed stents 91 1997
 
BOSTON SCIENTIFIC SCIMED, INC. (1)
5366504 Tubular medical prosthesis 509 1992
 
COOK MEDICAL TECHNOLOGIES LLC (1)
5443498 Vascular stent and method of making and implanting a vacsular stent 511 1993
 
World Properties, Inc. (1)
* 4944087 Method of making a curved plastic body with circuit pattern 25 1988
 
SULZER INTRA THERAPEUTICS, INC. (1)
5741429 Flexible tubular device for use in medical applications 290 1995
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (2)
* 2006/0155,367 Micro-pleated stent assembly 5 2005
* 2013/0286,367 ROLL-TO-ROLL DIGITAL PHOTOLITHOGRAPHY 0 2013
 
KOREA INSTITUTE OF MACHINERY & MATERIALS (1)
* 2012/0204,745 ROLL IMPRINTING APPARATUS 0 2010
 
RABBIT TANAKA CORPORATION, LTD. (1)
6844948 Integral hologram revolving lamp and method for making same 4 2002
 
3M INNOVATIVE PROPERTIES COMPANY (1)
* 9465304 Roll-to-roll digital photolithography 0 2013
 
MACDERMID PRINTING SOLUTIONS EUROPE SAS (2)
* 8603583 Embossing device, such as a cylinder or a sleeve 0 2007
* 2009/0136,679 EMBOSSING DEVICE, SUCH AS A CYLINDER OR A SLEEVE 7 2007
 
METAMATERIAL TECHNOLOGIES USA, INC. (8)
8518633 Large area nanopatterning method and apparatus 5 2009
8192920 Lithography method 7 2009
* 2009/0269,705 Lighography method 12 2009
8425789 Method and apparatus for anisotropic etching 4 2009
* 2010/0173,494 Method and apparatus for anisotropic etching 17 2009
* 9465296 Nanopatterning method and apparatus 0 2012
* 2012/0274,004 NANOPATTERNING METHOD AND APPARATUS 2 2012
9069244 Mask for near-field lithography and fabrication the same 0 2013
 
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM (27)
* 6873087 High precision orientation alignment and gap control stages for imprint lithography processes 87 2000
6964793 Method for fabricating nanoscale patterns in light curable compositions using an electric field 47 2001
6921615 High-resolution overlay alignment methods for imprint lithography 74 2001
6954275 Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography 43 2001
8016277 Flexure based macro motion translation stage 4 2001
6919152 High resolution overlay alignment systems for imprint lithography 24 2003
6916585 Method of varying template dimensions to achieve alignment during imprint lithography 55 2003
* 2004/0053,146 Method of varying template dimensions to achieve alignment during imprint lithography 7 2003
7157036 Method to reduce adhesion between a conformable region and a pattern of a mold 55 2003
7090716 Single phase fluid imprint lithography method 31 2003
6842229 Imprint lithography template comprising alignment marks 53 2003
7060324 Method of creating a dispersion of a liquid on a substrate 12 2004
8076386 Materials for imprint lithography 6 2004
6955868 Method to control the relative position between a body and a surface 9 2004
* 2005/0089,774 METHOD TO CONTROL THE RELATIVE POSITION BETWEEN A BODY AND A SURFACE 0 2004
7060402 Method of orientating a template with respect to a substrate in response to a force exerted on the template 22 2004
* 2004/0168,588 Method of orientating a template with respect to a substrate in response to a force exerted on the template 1 2004
7098572 Apparatus to control displacement of a body spaced-apart from a surface 17 2004
6986975 Method of aligning a template with a substrate employing moire patterns 30 2004
* 2004/0189,996 Method of aligning a template with a substrate employing moire patterns 0 2004
6902853 Dual wavelength method of determining a relative position of a substrate and a template 23 2004
* 2004/0209,177 Dual wavelength method of determining a relative position of a substrate and a template 0 2004
* 2005/0236,739 Step and flash imprint lithography 33 2005
7432634 Remote center compliant flexure device 6 2005
* 2008/0095,878 Imprint Lithography Template Having a Feature Size Under 250 nm 10 2007
9223202 Method of automatic fluid dispensing for imprint lithography processes 0 2007
8211214 Single phase fluid imprint lithography method 1 2008
 
CORTADO AG (1)
7613798 Method for processing printing orders in server-based networks, and corresponding server-based network 5 2002
 
MOLECULAR IMPRINTS, INC. (66)
7037639 Methods of manufacturing a lithography template 32 2002
6926929 System and method for dispensing liquids 24 2002
7077992 Step and repeat imprint lithography processes 139 2002
6932934 Formation of discontinuous films during an imprint lithography process 124 2002
6908861 Method for imprint lithography using an electric field 120 2002
* 6900881 Step and repeat imprint lithography systems 106 2002
* 2004/0009,673 Method and system for imprint lithography using an electric field 8 2002
* 2004/0008,334 Step and repeat imprint lithography systems 31 2002
7070405 Alignment systems for imprint lithography 64 2002
7027156 Scatterometry alignment for imprint lithography 46 2002
6916584 Alignment methods for imprint lithography 99 2002
7071088 Method for fabricating bulbous-shaped vias 32 2002
8349241 Method to arrange features on a substrate to replicate features having minimal dimensional variability 5 2002
7019819 Chucking system for modulating shapes of substrates 29 2002
6929762 Method of reducing pattern distortions during imprint lithography processes 33 2002
6980282 Method for modulating shapes of substrates 36 2002
* 2004/0112,861 Method for modulating shapes of substrates 3 2002
6871558 Method for determining characteristics of substrate employing fluid geometries 28 2002
* 2004/0112,153 Method and system for determining characteristics of substrates employing fluid geometries 0 2002
7452574 Method to reduce adhesion between a polymerizable layer and a substrate employing a fluorine-containing layer 2 2003
7179396 Positive tone bi-layer imprint lithography method 40 2003
7396475 Method of forming stepped structures employing imprint lithography 50 2003
6951173 Assembly and method for transferring imprint lithography templates 40 2003
7179079 Conforming template for patterning liquids disposed on substrates 21 2003
7442336 Capillary imprinting technique 5 2003
* 2005/0061,773 Capillary imprinting technique 10 2003
7136150 Imprint lithography template having opaque alignment marks 75 2003
7122079 Composition for an etching mask comprising a silicon-containing material 10 2004
7785526 Imprint alignment method, system, and template 8 2004
7939131 Method to provide a layer with uniform etch characteristics 0 2004
7547504 Pattern reversal employing thick residual layers 3 2004
7636999 Method of retaining a substrate to a wafer chuck 20 2005
* 2006/0172,553 Method of retaining a substrate to a wafer chuck 18 2005
* 2006/0177,532 Imprint lithography method to control extrusion of a liquid from a desired region on a substrate 16 2005
* 2006/0177,535 Imprint lithography template to facilitate control of liquid movement 18 2005
7811505 Method for fast filling of templates for imprint lithography using on template dispense 1 2005
7727453 Step and repeat imprint lithography processes 7 2005
7338275 Formation of discontinuous films during an imprint lithography process 66 2005
* 2005/0270,312 Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing 41 2005
7665981 System to transfer a template transfer body between a motion stage and a docking plate 1 2005
* 2007/0074,635 System to couple a body and a docking plate 3 2005
* 2007/0064,384 Method to transfer a template transfer body between a motion stage and a docking plate 1 2005
7670534 Method to control an atmosphere between a body and a substrate 2 2005
7803308 Technique for separating a mold from solidified imprinting material 5 2005
7906058 Bifurcated contact printing technique 3 2005
* 2006/0125,154 Method to improve the flow rate of imprinting material employing an absorption layer 5 2006
7906180 Composition for an etching mask comprising a silicon-containing material 2 2006
7670529 Method and system for double-sided patterning of substrates 9 2006
7981481 Method for controlling distribution of fluid components on a body 1 2006
7670530 Patterning substrates employing multiple chucks 4 2007
7699598 Conforming template for patterning liquids disposed on substrates 6 2007
7635263 Chucking system comprising an array of fluid chambers 14 2007
* 2007/0190,200 Chucking system comprising an array of fluid chambers 17 2007
8142850 Patterning a plurality of fields on a substrate to compensate for differing evaporation times 1 2007
7547398 Self-aligned process for fabricating imprint templates containing variously etched features 4 2007
8850980 Tessellated patterns in imprint lithography 0 2007
7802978 Imprinting of partial fields at the edge of the wafer 4 2007
* 2007/0228,608 Preserving Filled Features when Vacuum Wiping 8 2007
* 2007/0228,593 Residual Layer Thickness Measurement and Correction 22 2007
7780893 Method of concurrently patterning a substrate having a plurality of fields and a plurality of alignment marks 10 2007
8808808 Method for imprint lithography utilizing an adhesion primer layer 0 2007
7854867 Method for detecting a particle in a nanoimprint lithography system 1 2007
* 2007/0246,850 Method for Detecting a Particle in a Nanoimprint Lithography System 11 2007
8012395 Template having alignment marks formed of contrast material 2 2009
8647554 Residual layer thickness measurement and correction 0 2010
8366434 Imprint alignment method, system and template 0 2010
 
Electroformed Stents, Inc. (4)
6904658 Process for forming a porous drug delivery layer 67 2003
* 2004/0237,282 Process for forming a porous drug delivery layer 51 2003
* 2005/0090,888 Pleated stent assembly 63 2003
* 2007/0288,083 Exclusion Device and System For Delivery 59 2007
 
BIOSENSORS INTERNATIONAL GROUP, LTD. (5)
7901451 Drug-delivery endovascular stent and method for treating restenosis 1 2005
* 2006/0069,427 Drug-delivery endovascular stent and method for treating restenosis 58 2005
* 2008/0103,584 Temporal Intraluminal Stent, Methods of Making and Using 32 2007
8252047 Drug-delivery endovascular stent and method for treating restenosis 1 2011
8871292 Drug-delivery endovascular stent and method for treating restenosis 1 2012
 
BOSTON SCIENTIFIC SCIMED, INC. (4)
8221824 Deforming surface of drug eluting coating to alter drug release profile of a medical device 0 2005
* 2006/0171,982 Deforming surface of drug eluting coating to alter drug release profile of a medical device 7 2005
7935379 Coated and imprinted medical devices and methods of making the same 1 2005
* 2007/0110,888 Coated and imprinted medical devices and methods of making the same 44 2005
 
C-Flex Bearing Co., Inc. (1)
7824270 Flexible coupling 0 2007
 
BOARD OF REGENTS OF THE UT SYSTEM, THE (1)
* 2004/0104,641 Method of separating a template from a substrate during imprint lithography 0 2003
 
ROLITH, INC. (1)
* 2010/0123,885 Large area nanopatterning method and apparatus 10 2009
* Cited By Examiner