US Patent No: 6,274,294

Number of patents in Portfolio can not be more than 2000

Cylindrical photolithography exposure process and apparatus

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Abstract

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The present invention is directed to a novel apparatus for exposing a pattern onto a photoresist-coated substrate cylinder and the process of using the apparatus. The cylindrical photolithography apparatus of the present invention comprises two adjacent cylindrical support rollers between which a portion of a flexible photomask extends in the form of a loop. The photoresist-coated substrate cylinder is received in the loop and a tension device, such as a weight, is engaged with the photomask to pull the photomask into contact with the photoresist-coated substrate cylinder over a substantial portion of the circumference of the substrate cylinder. A drive mechanism pulls the photomask over the surface of the photoresist-coated substrate cylinder thereby causing the substrate cylinder to rotate. Exposure light is provided during movement of the photomask to expose a pattern contained on the photomask onto the photoresist. In an alternative embodiment of the present invention, designed for small substrate cylinders and/or substrate cylinders coated with a thick resist, a cylindrical lens is supported above the support cylinders and the photoresist-coated substrate cylinder to focus the light from the light device in a radial direction to increase resolution of the pattern. In applications requiring even higher resolution, a panel defining an aperture slit is placed between the light device and cylindrical lens to further focus the light rays.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
ELECTROFORMED STENTS, INC.STILWELL, KS5

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hines, Richard A Stilwell, KS 13 289

Cited Art Landscape

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BODNAR, ENDRE (1)
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COMMISSARIAT A L'ENERGIE ATOMIQUE (1)
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COOK MEDICAL TECHNOLOGIES LLC (1)
5,443,498 Vascular stent and method of making and implanting a vacsular stent 440 1993
 
EXPANDABLE GRAFTS PARTNERSHIP, 8000 I.H. 10 WEST, STE. 1265, SAN ANTONIO, TX A GENERAL PARTNERSHIP OF TX. (1)
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EXPANDABLE GRAFTS PARTNERSHIP, A TX. GENERAL PARTNERSHIP (1)
4,776,337 Expandable intraluminal graft, and method and apparatus for implanting an expandable intraluminal graft 1123 1986
 
Industrial Research B.V. (1)
5,464,419 Expandable hollow sleeve for the local support and/or reinforcement of a body vessel, and method for the fabrication thereof 59 1994
 
MEDINOL LTD. (1)
5,449,373 Articulated stent 660 1994
 
ROITBERG, BEN Z. (1)
6,019,784 Process for making electroformed stents 71 1997
 
SULZER INTRA THERAPEUTICS, INC. (1)
5,741,429 Flexible tubular device for use in medical applications 165 1995
 
WORLD PROPERTIES, INC. (1)
4,944,087 Method of making a curved plastic body with circuit pattern 20 1988
 
Other [Check patent profile for assignment information] (1)
4,509,426 Autoreversing dual axial speed ink roller 14 1984

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
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6,926,929 System and method for dispensing liquids 21 2002
7,077,992 Step and repeat imprint lithography processes 96 2002
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6,908,861 Method for imprint lithography using an electric field 95 2002
6,900,881 Step and repeat imprint lithography systems 86 2002
7,070,405 Alignment systems for imprint lithography 49 2002
7,027,156 Scatterometry alignment for imprint lithography 35 2002
6,916,584 Alignment methods for imprint lithography 77 2002
7,071,088 Method for fabricating bulbous-shaped vias 28 2002
8,349,241 Method to arrange features on a substrate to replicate features having minimal dimensional variability 0 2002
7,019,819 Chucking system for modulating shapes of substrates 25 2002
6,929,762 Method of reducing pattern distortions during imprint lithography processes 27 2002
6,980,282 Method for modulating shapes of substrates 28 2002
6,871,558 Method for determining characteristics of substrate employing fluid geometries 26 2002
7,452,574 Method to reduce adhesion between a polymerizable layer and a substrate employing a fluorine-containing layer 1 2003
7,179,396 Positive tone bi-layer imprint lithography method 21 2003
7,396,475 Method of forming stepped structures employing imprint lithography 27 2003
6,951,173 Assembly and method for transferring imprint lithography templates 31 2003
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7,442,336 Capillary imprinting technique 4 2003
7,136,150 Imprint lithography template having opaque alignment marks 64 2003
7,122,079 Composition for an etching mask comprising a silicon-containing material 7 2004
7,785,526 Imprint alignment method, system, and template 1 2004
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7,547,504 Pattern reversal employing thick residual layers 0 2004
7,636,999 Method of retaining a substrate to a wafer chuck 9 2005
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7,727,453 Step and repeat imprint lithography processes 4 2005
7,338,275 Formation of discontinuous films during an imprint lithography process 36 2005
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7,670,534 Method to control an atmosphere between a body and a substrate 1 2005
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7,906,058 Bifurcated contact printing technique 1 2005
7,906,180 Composition for an etching mask comprising a silicon-containing material 0 2006
7,670,529 Method and system for double-sided patterning of substrates 7 2006
7,981,481 Method for controlling distribution of fluid components on a body 0 2006
7,670,530 Patterning substrates employing multiple chucks 2 2007
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7,547,398 Self-aligned process for fabricating imprint templates containing variously etched features 2 2007
7,802,978 Imprinting of partial fields at the edge of the wafer 1 2007
7,780,893 Method of concurrently patterning a substrate having a plurality of fields and a plurality of alignment marks 3 2007
7,854,867 Method for detecting a particle in a nanoimprint lithography system 0 2007
8,012,395 Template having alignment marks formed of contrast material 0 2009
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BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM (19)
6,873,087 High precision orientation alignment and gap control stages for imprint lithography processes 60 2000
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6,921,615 High-resolution overlay alignment methods for imprint lithography 67 2001
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8,016,277 Flexure based macro motion translation stage 1 2001
6,919,152 High resolution overlay alignment systems for imprint lithography 20 2003
6,916,585 Method of varying template dimensions to achieve alignment during imprint lithography 50 2003
7,157,036 Method to reduce adhesion between a conformable region and a pattern of a mold 28 2003
7,090,716 Single phase fluid imprint lithography method 25 2003
6,842,229 Imprint lithography template comprising alignment marks 48 2003
7,060,324 Method of creating a dispersion of a liquid on a substrate 10 2004
8,076,386 Materials for imprint lithography 1 2004
6,955,868 Method to control the relative position between a body and a surface 7 2004
7,060,402 Method of orientating a template with respect to a substrate in response to a force exerted on the template 20 2004
7,098,572 Apparatus to control displacement of a body spaced-apart from a surface 11 2004
6,986,975 Method of aligning a template with a substrate employing moire patterns 26 2004
6,902,853 Dual wavelength method of determining a relative position of a substrate and a template 22 2004
7,432,634 Remote center compliant flexure device 2 2005
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ROLITH, INC. (3)
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BIOSENSORS INTERNATIONAL GROUP, LTD. (2)
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C-FLEX BEARING CO., INC. (1)
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CORTADO AG (1)
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ELECTROFORMED STENTS, INC. (1)
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MACDERMID PRINTING SOLUTIONS EUROPE SAS (1)
8,603,583 Embossing device, such as a cylinder or a sleeve 0 2007
 
RABBIT TANAKA CORPORATION LIMITED (1)
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