US Patent No: 6,274,294

Number of patents in Portfolio can not be more than 2000

Cylindrical photolithography exposure process and apparatus

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Abstract

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The present invention is directed to a novel apparatus for exposing a pattern onto a photoresist-coated substrate cylinder and the process of using the apparatus. The cylindrical photolithography apparatus of the present invention comprises two adjacent cylindrical support rollers between which a portion of a flexible photomask extends in the form of a loop. The photoresist-coated substrate cylinder is received in the loop and a tension device, such as a weight, is engaged with the photomask to pull the photomask into contact with the photoresist-coated substrate cylinder over a substantial portion of the circumference of the substrate cylinder. A drive mechanism pulls the photomask over the surface of the photoresist-coated substrate cylinder thereby causing the substrate cylinder to rotate. Exposure light is provided during movement of the photomask to expose a pattern contained on the photomask onto the photoresist. In an alternative embodiment of the present invention, designed for small substrate cylinders and/or substrate cylinders coated with a thick resist, a cylindrical lens is supported above the support cylinders and the photoresist-coated substrate cylinder to focus the light from the light device in a radial direction to increase resolution of the pattern. In applications requiring even higher resolution, a panel defining an aperture slit is placed between the light device and cylindrical lens to further focus the light rays.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
ELECTROFORMED STENTS, INC.STILWELL, KS4

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hines, Richard A Stilwell, KS 10 428

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (1)
* 4,509,426 Autoreversing dual axial speed ink roller 14 1984
 
CORDIS CORPORATION (2)
5,102,417 Expandable intraluminal graft, and method and apparatus for implanting an expandable intraluminal graft 959 1988
5,195,984 Expandable intraluminal graft 703 1991
 
Advanced Cardiovascular Systems, Inc. (3)
5,421,955 Expandable stents and method for making same 719 1994
5,443,500 Intravascular stent 508 1994
5,649,952 Expandable stents and method for making same 237 1996
 
Industrial Research B.V. (1)
5,464,419 Expandable hollow sleeve for the local support and/or reinforcement of a body vessel, and method for the fabrication thereof 77 1994
 
Medinol Ltd. (1)
5,449,373 Articulated stent 749 1994
 
COMMISSARIAT A L'ENERGIE ATOMIQUE (1)
* 4,434,547 Process for the manufacture and adjustment of a Josephson effect magnetic flux pick-up 3 1981
 
EXPANDABLE GRAFTS PARTNERSHIP, A TX. GENERAL PARTNERSHIP (1)
4,776,337 Expandable intraluminal graft, and method and apparatus for implanting an expandable intraluminal graft 1316 1986
 
EXPANDABLE GRAFTS PARTNERSHIP, 8000 I.H. 10 WEST, STE. 1265, SAN ANTONIO, TX A GENERAL PARTNERSHIP OF TX. (1)
4,733,665 Expandable intraluminal graft, and method and apparatus for implanting an expandable intraluminal graft 2597 1985
 
BODNAR, ENDRE (1)
4,343,048 Stent for a cardiac valve 360 1980
 
ROITBERG, BEN Z (1)
* 6,019,784 Process for making electroformed stents 90 1997
 
BOSTON SCIENTIFIC SCIMED, INC. (1)
5,366,504 Tubular medical prosthesis 501 1992
 
COOK MEDICAL TECHNOLOGIES LLC (1)
5,443,498 Vascular stent and method of making and implanting a vacsular stent 506 1993
 
WORLD PROPERTIES, INC. (1)
* 4,944,087 Method of making a curved plastic body with circuit pattern 25 1988
 
SULZER INTRA THERAPEUTICS, INC. (1)
5,741,429 Flexible tubular device for use in medical applications 287 1995
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (2)
* 2006/0155,367 Micro-pleated stent assembly 5 2005
* 2013/0286,367 ROLL-TO-ROLL DIGITAL PHOTOLITHOGRAPHY 0 2013
 
KOREA INSTITUTE OF MACHINERY & MATERIALS (1)
* 2012/0204,745 ROLL IMPRINTING APPARATUS 0 2010
 
RABBIT TANAKA CORPORATION, LTD. (1)
6,844,948 Integral hologram revolving lamp and method for making same 3 2002
 
3M INNOVATIVE PROPERTIES COMPANY (1)
* 9,465,304 Roll-to-roll digital photolithography 0 2013
 
MACDERMID PRINTING SOLUTIONS EUROPE SAS (2)
* 8,603,583 Embossing device, such as a cylinder or a sleeve 0 2007
* 2009/0136,679 EMBOSSING DEVICE, SUCH AS A CYLINDER OR A SLEEVE 7 2007
 
METAMATERIAL TECHNOLOGIES USA, INC. (8)
8,518,633 Large area nanopatterning method and apparatus 5 2009
8,192,920 Lithography method 6 2009
* 2009/0269,705 Lighography method 12 2009
8,425,789 Method and apparatus for anisotropic etching 4 2009
* 2010/0173,494 Method and apparatus for anisotropic etching 15 2009
* 9,465,296 Nanopatterning method and apparatus 0 2012
* 2012/0274,004 NANOPATTERNING METHOD AND APPARATUS 2 2012
9,069,244 Mask for near-field lithography and fabrication the same 0 2013
 
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM (27)
* 6,873,087 High precision orientation alignment and gap control stages for imprint lithography processes 86 2000
6,964,793 Method for fabricating nanoscale patterns in light curable compositions using an electric field 47 2001
6,921,615 High-resolution overlay alignment methods for imprint lithography 74 2001
6,954,275 Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography 43 2001
8,016,277 Flexure based macro motion translation stage 4 2001
6,919,152 High resolution overlay alignment systems for imprint lithography 24 2003
6,916,585 Method of varying template dimensions to achieve alignment during imprint lithography 55 2003
* 2004/0053,146 Method of varying template dimensions to achieve alignment during imprint lithography 7 2003
7,157,036 Method to reduce adhesion between a conformable region and a pattern of a mold 53 2003
7,090,716 Single phase fluid imprint lithography method 31 2003
6,842,229 Imprint lithography template comprising alignment marks 53 2003
7,060,324 Method of creating a dispersion of a liquid on a substrate 12 2004
8,076,386 Materials for imprint lithography 5 2004
6,955,868 Method to control the relative position between a body and a surface 9 2004
* 2005/0089,774 METHOD TO CONTROL THE RELATIVE POSITION BETWEEN A BODY AND A SURFACE 0 2004
7,060,402 Method of orientating a template with respect to a substrate in response to a force exerted on the template 22 2004
* 2004/0168,588 Method of orientating a template with respect to a substrate in response to a force exerted on the template 1 2004
7,098,572 Apparatus to control displacement of a body spaced-apart from a surface 17 2004
6,986,975 Method of aligning a template with a substrate employing moire patterns 30 2004
* 2004/0189,996 Method of aligning a template with a substrate employing moire patterns 0 2004
6,902,853 Dual wavelength method of determining a relative position of a substrate and a template 23 2004
* 2004/0209,177 Dual wavelength method of determining a relative position of a substrate and a template 0 2004
* 2005/0236,739 Step and flash imprint lithography 33 2005
7,432,634 Remote center compliant flexure device 6 2005
* 2008/0095,878 Imprint Lithography Template Having a Feature Size Under 250 nm 10 2007
9,223,202 Method of automatic fluid dispensing for imprint lithography processes 0 2007
8,211,214 Single phase fluid imprint lithography method 1 2008
 
CORTADO AG (1)
7,613,798 Method for processing printing orders in server-based networks, and corresponding server-based network 5 2002
 
MOLECULAR IMPRINTS, INC. (66)
7,037,639 Methods of manufacturing a lithography template 32 2002
6,926,929 System and method for dispensing liquids 24 2002
7,077,992 Step and repeat imprint lithography processes 138 2002
6,932,934 Formation of discontinuous films during an imprint lithography process 123 2002
6,908,861 Method for imprint lithography using an electric field 119 2002
* 6,900,881 Step and repeat imprint lithography systems 105 2002
* 2004/0009,673 Method and system for imprint lithography using an electric field 8 2002
* 2004/0008,334 Step and repeat imprint lithography systems 30 2002
7,070,405 Alignment systems for imprint lithography 64 2002
7,027,156 Scatterometry alignment for imprint lithography 46 2002
6,916,584 Alignment methods for imprint lithography 96 2002
7,071,088 Method for fabricating bulbous-shaped vias 32 2002
8,349,241 Method to arrange features on a substrate to replicate features having minimal dimensional variability 4 2002
7,019,819 Chucking system for modulating shapes of substrates 29 2002
6,929,762 Method of reducing pattern distortions during imprint lithography processes 33 2002
6,980,282 Method for modulating shapes of substrates 36 2002
* 2004/0112,861 Method for modulating shapes of substrates 3 2002
6,871,558 Method for determining characteristics of substrate employing fluid geometries 28 2002
* 2004/0112,153 Method and system for determining characteristics of substrates employing fluid geometries 0 2002
7,452,574 Method to reduce adhesion between a polymerizable layer and a substrate employing a fluorine-containing layer 2 2003
7,179,396 Positive tone bi-layer imprint lithography method 39 2003
7,396,475 Method of forming stepped structures employing imprint lithography 49 2003
6,951,173 Assembly and method for transferring imprint lithography templates 40 2003
7,179,079 Conforming template for patterning liquids disposed on substrates 21 2003
7,442,336 Capillary imprinting technique 5 2003
* 2005/0061,773 Capillary imprinting technique 10 2003
7,136,150 Imprint lithography template having opaque alignment marks 75 2003
7,122,079 Composition for an etching mask comprising a silicon-containing material 10 2004
7,785,526 Imprint alignment method, system, and template 8 2004
7,939,131 Method to provide a layer with uniform etch characteristics 0 2004
7,547,504 Pattern reversal employing thick residual layers 3 2004
7,636,999 Method of retaining a substrate to a wafer chuck 20 2005
* 2006/0172,553 Method of retaining a substrate to a wafer chuck 16 2005
* 2006/0177,532 Imprint lithography method to control extrusion of a liquid from a desired region on a substrate 16 2005
* 2006/0177,535 Imprint lithography template to facilitate control of liquid movement 18 2005
7,811,505 Method for fast filling of templates for imprint lithography using on template dispense 1 2005
7,727,453 Step and repeat imprint lithography processes 7 2005
7,338,275 Formation of discontinuous films during an imprint lithography process 66 2005
* 2005/0270,312 Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing 41 2005
7,665,981 System to transfer a template transfer body between a motion stage and a docking plate 1 2005
* 2007/0074,635 System to couple a body and a docking plate 3 2005
* 2007/0064,384 Method to transfer a template transfer body between a motion stage and a docking plate 1 2005
7,670,534 Method to control an atmosphere between a body and a substrate 2 2005
7,803,308 Technique for separating a mold from solidified imprinting material 5 2005
7,906,058 Bifurcated contact printing technique 3 2005
* 2006/0125,154 Method to improve the flow rate of imprinting material employing an absorption layer 5 2006
7,906,180 Composition for an etching mask comprising a silicon-containing material 2 2006
7,670,529 Method and system for double-sided patterning of substrates 9 2006
7,981,481 Method for controlling distribution of fluid components on a body 0 2006
7,670,530 Patterning substrates employing multiple chucks 4 2007
7,699,598 Conforming template for patterning liquids disposed on substrates 6 2007
7,635,263 Chucking system comprising an array of fluid chambers 13 2007
* 2007/0190,200 Chucking system comprising an array of fluid chambers 16 2007
8,142,850 Patterning a plurality of fields on a substrate to compensate for differing evaporation times 1 2007
7,547,398 Self-aligned process for fabricating imprint templates containing variously etched features 4 2007
8,850,980 Tessellated patterns in imprint lithography 0 2007
7,802,978 Imprinting of partial fields at the edge of the wafer 4 2007
* 2007/0228,608 Preserving Filled Features when Vacuum Wiping 8 2007
* 2007/0228,593 Residual Layer Thickness Measurement and Correction 22 2007
7,780,893 Method of concurrently patterning a substrate having a plurality of fields and a plurality of alignment marks 10 2007
8,808,808 Method for imprint lithography utilizing an adhesion primer layer 0 2007
7,854,867 Method for detecting a particle in a nanoimprint lithography system 1 2007
* 2007/0246,850 Method for Detecting a Particle in a Nanoimprint Lithography System 10 2007
8,012,395 Template having alignment marks formed of contrast material 2 2009
8,647,554 Residual layer thickness measurement and correction 0 2010
8,366,434 Imprint alignment method, system and template 0 2010
 
Electroformed Stents, Inc. (4)
6,904,658 Process for forming a porous drug delivery layer 67 2003
* 2004/0237,282 Process for forming a porous drug delivery layer 51 2003
* 2005/0090,888 Pleated stent assembly 59 2003
* 2007/0288,083 Exclusion Device and System For Delivery 57 2007
 
BIOSENSORS INTERNATIONAL GROUP, LTD. (5)
7,901,451 Drug-delivery endovascular stent and method for treating restenosis 1 2005
* 2006/0069,427 Drug-delivery endovascular stent and method for treating restenosis 58 2005
* 2008/0103,584 Temporal Intraluminal Stent, Methods of Making and Using 30 2007
8,252,047 Drug-delivery endovascular stent and method for treating restenosis 1 2011
8,871,292 Drug-delivery endovascular stent and method for treating restenosis 1 2012
 
BOSTON SCIENTIFIC SCIMED, INC. (4)
8,221,824 Deforming surface of drug eluting coating to alter drug release profile of a medical device 0 2005
* 2006/0171,982 Deforming surface of drug eluting coating to alter drug release profile of a medical device 7 2005
7,935,379 Coated and imprinted medical devices and methods of making the same 1 2005
* 2007/0110,888 Coated and imprinted medical devices and methods of making the same 42 2005
 
C-Flex Bearing Co., Inc. (1)
7,824,270 Flexible coupling 0 2007
 
BOARD OF REGENTS OF THE UT SYSTEM, THE (1)
* 2004/0104,641 Method of separating a template from a substrate during imprint lithography 0 2003
 
ROLITH, INC. (1)
* 2010/0123,885 Large area nanopatterning method and apparatus 10 2009
* Cited By Examiner